Used STEAG / MATTSON / AST SHS 2000 #9155403 for sale

STEAG / MATTSON / AST SHS 2000
ID: 9155403
Wafer Size: 6"
Vintage: 1996
Rapid thermal processor systems (RTP), 6" 1996 vintage.
STEAG / MATTSON / AST SHS 2000 is a rapid thermal processor (RTP) designed to help semiconductor manufacturers efficiently produce high quality semiconductor wafers. It utilizes powerful infrared lamps and an air jet system to rapidly thermally process the wafer's surface. Rapid thermal processing is an important step in semiconductor production used to create different processing states on a wafer. AST SHS 2000 is a modular RTP system that can be optimized for different needs. It consists of a lamp enclosure, process control module and cooling frame. A variety of lamps are available to allow the user to select the most suitable energy range and power requirements for their process. The process control module ensures accurate and repeatable thermal ramp, soak and cooldown profiles to create ideal processing conditions. The built-in cooling frame with adjustable fan speeds helps quickly reduce the wafer surface temperature. The machine is also very easy to operate. It uses a proprietary graphical user interface (GUI) with touch screen for quick and precise parameters and settings adjustments. The GUI also maximizes throughput speed without sacrificing quality. Additionally, STEAG SHS-2000 offers low maintenance costs and parts availability which helps ensure reliability and cost efficiency over the long run. MATTSON SHS 2000 is an efficient, cost-effective solution for semiconductor manufacturers looking to rapidly and accurately process wafers on a small to medium scale. Its ease of use, low maintenance costs and modular design make AST SHS-2000 a great choice for streamlining semiconductor production.
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