Used STEAG / MATTSON / AST SHS 2800 #293813733 for sale

STEAG / MATTSON / AST SHS 2800 is an industrial-grade rapid thermal processor (RTP) used in a variety of microelectronic applications including research and development, production, and test/repair. AST SHS 2800 is designed to offer precise, repeatable thermal control in a wide range of temperatures to enable the fabrication of high-quality, high-performance micro-devices. STEAG SHS-2800 is capable of performing rapid thermal annealing (RTA), rapid thermal dopant activation (RTDA), rapid thermal oxidation (RTO), rapid thermal diffusion (RTD), rapid thermal nitridation (RTN), rapid thermal nitridation/oxidation (RTNO), and rapid thermal hydrogenation (RTH). It is equipped with an integrated substrate temperature monitoring system and multi-zone temperature control. It is capable of temperature ranges from -75 to +650°C with a maximum ramp rate of 15°C/s. STEAG / MATTSON / AST SHS-2800 features multiple options for wafer carriers, with user-defined contact force for uniform thermal contact. These carriers can be used for a variety of substrates up to 200mm in diameter. MATTSON SHS-2800 is also equipped with a 200W, quartz- halogen lamp for sample heating. The system is also equipped with multiple options for gas delivery, allowing for precise control of gas delivery with user-defined patterns for precise process control. STEAG SHS 2800 includes a Gas Mixer Module, with simultaneous delivery of up to 5 gases per module and fully user-defined gas mixtures. SHS 2800 also includes an optional Graphical User Interface (GUI), allowing for precise monitoring and control of all process parameters. It provides real-time graphics of the process parameters, including temperature and gas composition profiles. It also provides an automated wafer load/unload system, with automatic shut-off at the end of the process. SHS-2800 provides precise real-time control of all process parameters and datalogging of thermal and gas results. It is designed for ease of operation and maintenance and is housed in a Class 100 cleanroom frame for the ultimate in safety and reliability. Overall, AST SHS-2800 is an ideal choice for any microelectronic application requiring precise thermal control and uniformity. Its user-defined process parameters and wide range of temperatures enable fabrications of high-quality, high-performance micro-devices.