Used STEAG / MATTSON / AST SHS 2800 #9096061 for sale

STEAG / MATTSON / AST SHS 2800 is an advanced rapid thermal processor (RTP) designed for the quick and precise thermal processing of wafers and substrates. It is a state-of-the-art tool for rapid thermal annealing and rapid thermal oxidation processes. AST SHS 2800 allows fast thermal processing in a uniform system with precise control of solar energy conditions. Each chamber has two independent temperature zones, which can be programmed in any desired combination, and can reach maximum temperatures of 2400°C. The unique design of STEAG SHS-2800 prevents crosscontamination and limits the impact of particle generation, offering extra protection for sensitive substrates. The tool is equipped with a range of advanced diagnostics capabilities, enabling it to measure variables such as wafer temperature, gas flow, and pressure inside the chamber with accuracy and precision. It is also designed with a range of safety features that help prevent potential hazards and ensure safe operation. MATTSON SHS 2800 can process up to 200 300mm or 400 200mm wafers per hour, ensuring rapid turnaround. It also features a single-wafer dosing platform that ensures consistent wafer heating and eliminates thermal runaway. Additionally, the tool offers outstanding accuracy for substrates, require precise temperature control and uniformity. SHS 2800 Rapid Thermal Processor ensures fast thermal processing with advanced diagnostics and safety features, ensuring safe and effective operation. It offers exceptional process uniformity with maximum temperatures of 2400°C and safeguards against potential hazards. Finally, the single-wafer dosing platform ensures fast throughput and consistency of heating across the substrate.