Used STEAG / MATTSON / AST SHS 2800E #9092862 for sale

STEAG / MATTSON / AST SHS 2800E
ID: 9092862
Wafer Size: 2000
Rapid thermal processor, 2000 vintage.
STEAG / MATTSON / AST SHS 2800E Rapid Thermal Processor is a specialized equipment used for processing wafers and other semiconductor substrates at extreme temperatures. The equipment contains two primary components: a chamber and a dissipater. The chamber is a vacuum-resistant, double wall chamber with an internal shroud, which helps to funnel the concentrated heat to the substrate. The dissipater is an array of nine heating elements that are individually programmed to generate temperatures up to 1200° Celsius. The tight control of heating elements and their fast response make AST SHS 2800E the most versatile machine in its class. STEAG SHS 2800E is primarily used in semiconductor manufacturing for rapid-thermal annealing, diffusion and impurity implantation. With its state-of-the-art heat-cycle-control equipment, up to nine cycles can be performed with precision accuracy, even if the process parameters or the wafers are modified. This temperature control accuracy makes SHS 2800E the ideal machine for complex process steps such as poly-silicon gate activation, metal interconnect formation and SOI device processing. The machine also contains a small, movable platform so that wafers can be placed on the substrate quickly and easily. In addition, there is an advanced evaporator control system to allow for multiple evaporations inside the vacuum chamber. Furthermore, a real time diagnostic unit is integrated into the unit to provide detailed feedback on the process parameters, temperature, gas pressure and substrate temperature. MATTSON SHS 2800E is compact in size and comes with a built-in air conditioning machine for optimized cooling of the chamber. With a total process rate of up to 200 wafers per hour, the unit is incredibly efficient and is the ideal choice for semiconductor fabrication. It also comes with a user-friendly control tool, which is easy to program and understand, making it a great choice for industrial and research labs alike. In summary, STEAG / MATTSON / AST SHS 2800E Rapid Thermal Processor is one of the most reliable and efficient machines available on the market. Its high-precision temperature control and multi-cycle programming capabilities make it a perfect choice for any wafer processing application.
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