Used STEAG / MATTSON / AST SHS 2800E #9092863 for sale

STEAG / MATTSON / AST SHS 2800E Rapid Thermal Processor is a thermal processing equipment designed for a wide range of industrial and research applications. It is suitable for processing wafers up to 6 inches in diameter with maximum thickness of 0.2mm. It contains a single chamber heated by a pair of furnaces capable of delivering temperatures of up to 1100°C. These furnaces are situated above and below the chamber, so as to provide uniform heating across the entire substrate. The system also features precise temperature control with a high thermal uniformity, high ramp rate flexibility, wide range of process gases, and a wide processing pressure range (50 mbar C). It also has an integrated gas management unit with four gas lines capable of carrying nine different gases. The unit is automated and can be programmed with multiple recipes to maximize efficiency. The machine is equipped with an automated hatch load/unload tool and a wafered handling asset for up to 30 wafers per process run. It also has a process monitor for dual view of sample surface. In addition, the model features advanced safety features to protect personnel, the unit, and substrates from potential damages during operation. These include automatic monitoring of all safety equipment components, over-temperature alarm, nitrogen inlet and outlet flow detectors, as well as a powerful vacuum controller. The thermal processing system communicates with end user software via the PROCO Plus Interface, a distributed control unit. This allows a user to monitor the real-time process using the 2800E's integrated graphical user interface and to setup programs for running wafered processes from a remote location. AST SHS 2800E Rapid Thermal Processor is an advanced machine for high temperature processing and wafer-level manufacturing. It offers uniform and consistent heating of the substrate with excellent temperature control, as well as reliable safety features to protect personnel, the unit, and substrates. It is suitable for many industrial and research applications and can be programmed with recipes for automated runs.