Used STEAG / MATTSON / AST SHS-2800SF #293794331 for sale

STEAG / MATTSON / AST SHS-2800SF
ID: 293794331
Rapid thermal processor.
STEAG / MATTSON / AST SHS-2800SF is a Rapid Thermal Processing (RTP) device designed to improve the quality and performance of various industrial and consumer products. This product is suitable for the production of flash memory, ICs, optoelectronic devices, and other nanotechnology products. The device utilizes an innovative single-horizontal-stage thermotech engineered for reliable and accurate annealing and rapid thermal processing (RTP) applications. The device features a high powered 400mm quartz lamp set with an easy-to-install bulb holder and highly efficient refractor design. The electric power control is flexible and programmable, allowing for automated system operation. An internal PID controller provides precise temperature control, and the device is also equipped with safety interlocks. The device also includes a thermal transfer plate designed to provide uniform heating and cooling of small and large sample sizes. The RTP process relies on generating and transferring thermal energy in a short period of time. AST SHS-2800SF features a powerful convection-controlled chamber and a vacuum system for precise thermal processing. It has two heating zones (upper and lower) with separate temperature set points, enabling fast and accurate thermal processing. The upper heating zone is equipped with adjustable length IR lamps which can provide homogeneous temperature distribution across the sample, while the lower heating zone is covered with a plate to enable uniform cooling. The device also employs multi-channel ramping and steady-state temperature profiles. It can provide programmable ramp rates and hold times, and the time required for the RTP process can be accurately set and monitored. Additionally, temperature accuracy is maintained by an active temperature feedback system. The device is also designed with an energy-saving feature which can reduce energy losses caused by over-heating or frequent start-up/shutdown cycles. STEAG SHS-2800SF is an advanced RTP device which provides precise and reliable thermal processing for a variety of fabrication processes. With its powerful convection-controlled chamber, adjustable length IR lamps, multi-channel profiles and energy-saving feature, this machine is an excellent tool for precise and accurate fabrication.
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