Used STEAG / MATTSON / AST SHS-2800SF #293815994 for sale

STEAG / MATTSON / AST SHS-2800SF Rapid Thermal Processor (RTP) is a powerful and versatile tool designed to provide precise temperature control for a range of electrical, photonic, and optoelectronic devices. AST SHS-2800SF consists of a single electronic controller with two independent, high-speed, temperature-controlled stages. The primary stage provides uniform rapid heating and cooling with accuracy up to 10°C and a response time of 3-10 seconds. This stage is designed to support processes such as rapid thermal annealing (RTA), diffusion, oxidation, and silicidation. The secondary stage provides rapid cooling, with a response time of 4-15 seconds and a cooling rate of up to 1000°C/second. This temperature-controlled stage is designed to support processes such as rapid thermal nitride and rapid thermal oxidation. STEAG SHS-2800SF includes advanced thermocouple-based temperature control, providing precise temperature readings that can be monitored in real-time. This system also supports both single-shot and continuous process cycles, allowing for repeatable and consistent processes. The controller is enclosed in a hermetically sealed nitrogen-purged cabinet, which provides an additional level of temperature stability and control. An air-cooled airlock provides an additional layer of protection, allowing transfer of substrates to and from the RTP while maintaining the chamber atmosphere. MATTSON SHS-2800SF provides a powerful and versatile solution for precise temperature control processes. It has the ability to precisely control temperature with uniform heating and cooling, and its advanced temperature control system delivers repeatable and consistent processes. This high-performance instrument is a valuable tool for process development and production of a variety of electrical, photonic, and optoelectronic devices.