Used STEAG / MATTSON / AST SHS #9119657 for sale
URL successfully copied!
Tap to zoom
ID: 9119657
Rapid Thermal Processor (RTP)
No computer / Internal cards
Power: 400 V, 43 kW.
STEAG / MATTSON / AST SHS is an advanced rapid thermal processor designed to provide convenient and precise temperature control, accurate temperature monitoring, and reliable thermal control in semiconductor manufacturing. This product reduces process time, improves yield and provides a reduction in energy costs compared to traditional thermal processes. This fast thermal processor is used for the high speed functions of panel heating and cooling, die curing and diode laser circuitry development. The thermal processor supports any of the four standard temperatures used in semiconductor manufacturing, ranging from -30°C to 250°C. It features standard cycle time of one second and a temperature resolution of 0.01°C. This product offers precise temperature control and can be easily configured for many process conditions, including rapid cooling. The product features excellent dynamic process control and a proprietary Pulse Width Modulation (PWM) technique to reduce temperature overshoots and minimize thermal gradients, ensuring optimal product parameters. The processor includes several safety features, including a safety interlock system to ensure the process is operating within the specified safe temperature range and a thermowell for continuous monitoring of heat sink temperatures. This also includes an automated fail-safe feature to stop the thermal cycle in the event of over temperature/under voltage conditions. The product is made of robust materials and durable construction to help withstand the harsh manufacturing environment. Cool temperature air is circulated via dual-recirculation fans to cool down the product and maintain a safe temperature level. Its embedded computer provides operational control, recording, display, and analysis of critical process parameters for further optimization, while alarms, notifications, and warning are available for operation monitoring and system maintenance. The product also includes software for the generation of common profiles of thermal cycle parameters, creating custom heating and cooling routines, and monitoring the image of the thermal profile of the panel. This allows for the efficient operation of the thermal process, enhancing the quality of products. Additionally, this product comes with direct logic I/O for additional installation flexibility and can be seamlessly connected with other machines in the line for data transmission. With its versatile features and cutting edge thermal process control, AST SHS is the perfect thermal processor for semiconductor manufacturing and production.
There are no reviews yet