Used STEAG / MATTSON / AST SHS #9192433 for sale

STEAG / MATTSON / AST SHS is a robust, high-performance Rapid Thermal Processor (RTP) designed for use in semiconductor device production. It is capable of rapidly heating and cooling substrates, primarily used for processing of batch wafers and production run of small devices. AST SHS processor is a three-chamber, atmospheric-pressure RTP that utilizes Quadruple Heated Zone (QHZ) Rapid Thermal Annealing (RTA) technology. Each chamber is equipped with four independently controlled heating zones for precise temperature control. The temperature in each zone can be independently adjusted to within +/- 0.01°C of the desired set point, allowing for precise temperature control throughout the substrate. STEAG SHS also utilizes high-speed gas path flow to ensure efficient thermal performance and uniformity. The flow rate can be adjusted in both the heating and cooling regions. The overall design of MATTSON SHS consists of several stages. These include a chamber, pre-heater, zone heater, cooling receptacle, gas outlet, and two heated zone sources. The chamber is designed to provide controlled thermal cycling of substrate wafers, and is surrounded by an infrared absorber to maximize thermal efficiency. The pre-heater is used for rapid heating of substrates prior to processing in the Zone Heater. The Zone Heater is a four-zone system that can be adjusted to accommodate a wide range of temperatures, from -150 to +100 degrees Celsius. The cooling receptacle aids in the uniform cooling of substrates, and the gas outlet provides a rapid stream of gas to enable uniform cooling. The two heated zone sources provide precise temperature control from within the chamber. SHS is capable of operation in either batch or production runs, and is equipped with software to simplify the programming of any system parameters. The user interface of STEAG / MATTSON / AST SHS is straightforward and user-friendly, and offers a variety of graphical representations for easy visual feedback. Manual and automatic modes can also be used, allowing for streamlined operation of the process. Additionally, AST SHS also features a built-in safety system to ensure complete protection of personnel and substrates during processing. STEAG SHS is an ideal option for the production of a wide variety of integrated circuits, from small-scale devices to large-scale digital semiconductors. Through its unique combination of technology and user-friendly interface, it delivers efficient and reliable thermal processing.