Used TEL / TOKYO ELECTRON (Rapid Thermal Processors) for sale
TEL (Tokyo Electron Limited) is a leading manufacturer of semiconductor and flat panel display production equipment. Among its product offerings, TEL produces rapid thermal processors (RTP) that are widely used in the semiconductor industry. RTP is a thermal process that rapidly heats and cools semiconductor wafers to facilitate various steps in the chip manufacturing process. TEL's rapid thermal processors offer several advantages over conventional furnace-based systems. Firstly, they provide precise and uniform heating, allowing for better control of process parameters and resulting in improved wafer quality and device performance. Secondly, RTPs offer shorter process times, reducing overall production time and increasing throughput. Moreover, they are highly customizable, enabling process engineers to optimize settings for different materials and device structures. An example of TEL's rapid thermal processor is the Alpha-8S-ZAR. This model offers advanced temperature control and heating uniformity, ensuring excellent process repeatability. It features a multi-zone lamp design for efficient and uniform heating across the wafer surface. Additionally, it offers superior temperature ramp-up and cool-down rates, enabling faster processing times. TEL's rapid thermal processors, including the Alpha-8S-ZAR, are widely used in the industry for fabrication processes such as rapid thermal annealing, chemical vapor deposition, and oxidation. Their advanced capabilities and high-performance have made them a popular choice among semiconductor manufacturers for achieving precise and efficient thermal processing.
Filters
-
(1)