Used TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 #293760423 for sale

TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 rapid thermal processor is a high-speed wafer handling equipment that provides a fast, reliable and economical means for processing large quantities of wafers. This automated system utilizes an innovative design to reduce the number of hardware components and speed up the throughput, thus reducing overall operating costs. TEL 5BAO-200 utilizes an open-ended Chamber for improved thermal uniformity as well as independent, self-contained, fanless, convection cooled Chambers for lower power consumption and increased uptime. The design also incorporates multiple cassettes with sequential loading and unloading, and the loading positions use a semi-automated unit to accurately identify, locate, and expunge wafers from cassettes. The conveyor machine utilizes two edge conveyors with equal pressure applied to either side of the wafer, and the robot's endpoint control facilitates precise alignment and positioning of wafers. High-tech automation software and control systems are used to fully automate the operation process, with the ability to set up recipes for specific process steps. All setup data and operational information is stored in a remote, secure database, and users can access and monitor all process data. The tool also features auto-detection for wafer breakage in process, allowing for real-time alarming. WAFERMASTERS 5BAO-200 is fully programmable and features an integrated, open access platform, making it ideal for research and development. Furthermore, it offers full PC control and monitoring support, along with a data acquisition asset for precise process control. Overall, TOKYO ELECTRON 5BAO-200 rapid thermal processor is a powerful and reliable model for high speed wafer processing. It features advanced automation, precision controls, robust materials design, and comprehensive safety features, making it a reliable and cost-effective solution for processing wafers in large volumes.