Used TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 #9227375 for sale

TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 is a Rapid Thermal Processor (RTP) offering reliable high performance to process thermal processes for semiconductor wafers. It uses forced convection heating and cooling with multiple-zone capability to obtain precise temperature and uniformity control. TEL 5BAO-200 is designed to process large and heavy wafers, up to 8-inch diameter, with precise temperature control for heat treatment applications such as annealing, recrystallizing, and diffusion. It provides hot and cold wafer processing capability with multiple/dual-zone selection for precisely controlling the surface temperature of each wafer. WAFERMASTERS 5BAO-200 features a fast heating capability, with a response time of only 5 milliseconds to temperatures up to 1400˚C. This fast heating enables processes such as diffusion, oxidation, and nitridation to be completed in a fraction of the time required by traditional methods. TOKYO ELECTRON 5BAO-200 also offers a fast cooling option, with a cooling time of only 12 seconds from 1200˚C to room temperature. The system features an advanced controller with a 4x4 multiple-zone selection, enabling precise control of temperatures across the entire wafer surface. This allows for precise temperature adjustment for optimizing thermal processes, and precise temperature adjustment across multiple layers of material. These features allow wafers to be treated with greater accuracy and uniformity. In addition to advanced temperature control, 5BAO-200 also features a digital gas flow control with a turbo-type valve to provide repeatable deposits without variations. This gas flow control enhances the process repeatability and reproducibility. TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 also includes a quartz encapsulated automatic wafer transfer mechanism. This allows for efficient loading and unloading, reducing the exposure of the processed wafers to the ambient environment. This helps minimize oxidation or foreign material contamination of the wafers. TEL 5BAO-200 is a reliable and highly effective Rapid Thermal Processor, designed to meet the highest industry standards. It provides the latest in advanced heat processing technology, with precise temperature control, fast heating and cooling times, and advanced digital gas flow control. With its high-quality engineering and robust construction, WAFERMASTERS 5BAO-200 is ideal for applications such as diffusion, oxidation, and nitridation.