Used TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 #9375003 for sale

TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200
ID: 9375003
Rapid thermal annealing system.
TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 rapid thermal processor (RTP) is a leading-edge device designed to quickly and accurately process wafers in a broad range of applications such as chemical vapor deposition (CVD), physical vapor deposition (PVD), sputtering, oxidation, annealing, cleaning, and various other processes. TEL 5BAO-200 has the capability to rapidly process wafers from temperatures as low as room temperature to temperatures as high as 900°C in as little as 30 seconds. Additionally, this RTP also has a self-diagnostic and control equipment to ensure excellent results for any process. WAFERMASTERS 5BAO-200 utilizes a pneumatically-controlled chamber heaters to efficiently and quickly heat multiple wafers. This RTP is built with advanced simulation technology and cutting-edge 3-D modeling to create a heated chamber that accommodates up to 200 wafers at one time ranging from 4 to 6 inches in diameter. 5BAO-200 is equipped with a three independent mass flow proportional control system with integrated PID control that enables setting timing and temperatures with great precision. Moreover, TOKYO ELECTRON 5BAO-200 has been designed with excellent performance and convenience in mind and features multiple safety features including an emergency stop function and multiple back-up heating systems. It is constructed from superior materials and components that are designed to handle high power doses, creating a durable and robust product. Additionally, TEL / TOKYO ELECTRON / WAFERMASTERS 5BAO-200 includes a unique, non-contact wafer loading unit that rapidly reduces cycle time and increases throughput. In addition to the excellent features, TEL 5BAO-200 offers an intuitive control interface as well as remote capability for both routine maintenance and management of the machine. Finally, it is energy efficient and consumes less power than similar systems, reducing costs and promoting sustainability. Overall, WAFERMASTERS 5BAO-200 rapid thermal processor is a first-class device with innovative features that make it a superior choice in the industry. It effectively and efficiently provides rapid and precise thermal processing of wafers and is perfect for numerous applications, such as CVD, PVD, sputtering, oxidation, annealing, and cleaning.
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