Used TEL / TOKYO ELECTRON / WAFERMASTERS SRTF200-LP #9144808 for sale

TEL / TOKYO ELECTRON / WAFERMASTERS SRTF200-LP is an advanced rapid thermal processor used for wafer processing in semiconductor manufacturing. It has a patented continuous Rapid Thermal Processing (RTP) technology, enabling it to deliver high-precision thermal processing performance across a large range of materials and substrates. TEL SRTF200-LP is a single-reel carrier system with a temperature range from -25°C to 1600°C, that is suitable for a variety of process parameters. It has a unique spinning shutter door design for exchanging wafers during the thermal process and fast temperature ramps of up to 15 °C/sec, giving it a rapid thermal process solution like no other. It is also equipped with WaferVisionTM, an advanced vision system that allows precise wafer alignment during wafer transfer and vision monitoring during dynamic process steps. WAFERMASTERS SRTF200-LP also has a wide variety of optional modules that can be added in order to customize the system to a customer's specific process needs. These include a reactors module for DEP, PECVD, CVD, ALD and other layered materials processing; a susceptor heater for elevating wafers to temperatures above 1200°C; a quartz rack for receiving wafers from the Vacuum loading arm in the chamber; and an embedded laser interferometer for precise wafer loading and positioning. Thanks to its flexibility and high precision thermal process control, TOKYO ELECTRON SRTF200-LP allows for perfect process alignment and repeatability while providing an easily integrated solution into highly automated systems. It is an ideal solution for high-tech industries that require precise, efficient, and reliable thermal processing.