Used TEL / TOKYO ELECTRON / WAFERMASTERS SRTF200-LP #9210339 for sale

TEL / TOKYO ELECTRON / WAFERMASTERS SRTF200-LP is a rapid thermal processor (RTP) designed to meet the needs of semiconductor device manufacturing. It offers high process repeatability and superior process control capabilities, making it an effective solution for customers in a variety of production environments. TEL SRTF200-LP is an LED lamp-type RTP equipped with direct-driven, high-power LED lamps. The LED lamps offer a wide operating wavelength range and high uniformity, allowing for faster thermal processing of wafers even at lower temperatures. The lamp's excellent optical characteristics also enable tight control ofthe processing time, ensuring the highest precision possible. In order to optimize temperature uniformity and achieve quick heating and cooling times, WAFERMASTERS SRTF200-LP is equipped with a Peltier element-based cooling equipment. This cooling system helps maximize the uniformity of the temperature profile across the wafer, resulting in uniform and repeatable results. SRTF200-LP also comes with a SIEC-ON touchscreen interface, allowing for easy unit setup and operation. TOKYO ELECTRON SRTF200-LP comes equipped with a built-in Plasma Enhanced Chemical Vapor Deposition (PECVD) machine, which allows for deposition of various materials on the wafer surface. This tool offers greater uniformity and higher deposition rates than standard CVD processes. Additionally, its Compact Helix Infrared Source (CHIRS) asset offers higher deposition temperatures than standard narrow-line infrared sources. TEL / TOKYO ELECTRON / WAFERMASTERS SRTF200-LP also includes an in-situ wafer measurement model, allowing for precise characterization of process stability. This measurement equipment comes with a variety of analytical functions, including optical spectroscopy, x-ray line scan analysis, and scanning electron microscopy. In addition to these features, TEL SRTF200-LP also offers machine control options, including process status monitoring and data logging. This RTP also comes with a variety of safety features, ensuring safe operation. To maintain maximum performance, WAFERMASTERS SRTF200-LP has a built-in process monitoring system that automatically adjusts the temperature profile based on effects from product life and process time. Overall, SRTF200-LP is an excellent rapid thermal processor that provides reliable performance and excellent process control. Its efficient LED lamps, superior temperature uniformity, easy unit setup, and built-in PECVD and CHIRS systems make it the perfect choice for customers in a variety of production environments.