Used ULVAC / RIKO MILA-5000 #9113552 for sale
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ID: 9113552
Vintage: 2008
Rapid Thermal Processing (RTP) system
Desktop infrared furnace
RTP Oven
Micro processor controlled tube
Box furnaces
Sample holder
Mini lamp annealer
Water flow safety switch set
Atmosphere:
Air
Vacuum
Gas flow
Temperature: ~1200°C
Power supply: 200 V, 4 kW
2008 vintage.
ULVAC MILA-5000 is a rapid thermal processor (RTP) used to rapidly heat and cool substrates for sample processing. MILA-5000 is capable of heating to a maximum temperature of 1000°C and cooling to room temperature (<1ms) in just a fraction of a second. This is due to its powerful quartz tube inductive heating technology. The unit also features high temperature stability with minimal temperature fluctuations. ULVAC MILA-5000 is a versatile processor designed to guarantee accurate and consistent heating and cooling of substrates for a wide range of applications. It is an ideal tool for sample cleaning, aluminum reflow, rapid thermal annealing, and rapid ramping temperature to simulate a specific thermal process. Additionally, the unit can be used for deposition, oxidation, and etching applications. MILA-5000 is equipped with a convenient LCD touchscreen display and intuitive graphical user interface for easy operation and setup. Its built-in software offers smart thermal recipes for various applications, including dedicated test programs for deposition control and optimization. The unit also features a built-in isolation fan for optimized temperature control and reduced vibration. This is an advanced device designed for superior and predictable thermal processing performance. ULVAC MILA-5000 is robustly constructed with durable stainless steel and insulated quartz tubes to ensure reliability and wet- chemistry compatibility. It also features an integrated programmable HMWP (High-Performance Motorized Winding Platform), as well as auxiliary inputs and outputs for film & wire deposition control. Overall, MILA-5000 is an ideal rapid thermal processor for cutting-edge thermal process control. Its advanced design and intuitive user interface combined with rapid heating and cooling capabilities make it an ideal tool for a wide range of applications. It can provide accurate and reliable temperature profiles with minimal temperature fluctuation to guarantee superior sample processing performance.
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