Used ULVAC RTA-6000 #9055548 for sale

ULVAC RTA-6000
ID: 9055548
Vintage: 2010
Rapid thermal annealing system, 2010 vintage.
ULVAC RTA-6000 is a rapid thermal processor designed for a wide variety of high-throughput downstream processing applications. It offers a high-quality thermal processing capability that enables the production of high-precision microelectronic components with excellent reliability and repeatability. RTA-6000 includes a variety of features to ensure precise control over temperature, time and pressure. Its high frequency pulse technique modulation allows for the rapid heating and cooling of samples while maintaining a high degree of repeatable thermal uniformity. The result is uniformity of temperature within a heated zone of 1°C. ULVAC RTA-6000 is a temperature-controlled thermal processor designed for rapid thermal processing of wafers. It has an integrated chamber and susceptor technology for use in creating the required thermal environment for a wide variety of processes and materials. The equipment incorporates a heated zone temperature measurement system to ensure tight temperature control and consistently repeatable results. The continuous-flow gas fired unit allows for a consistent and steady heating environment at temperatures ranging up to 1100°C. The machine includes a range of process control systems and monitoring capabilities such as real-time data acquisition and analysis. RTA-6000 can be used to monitor product parameters like resistivity, diffusion, oxidation, nitridation, annealing, and many others. Moreover, the tool's integrated process control systems provide data logging and extensive reporting capabilities. In addition, the integrated process control asset features high efficiency and low temperature drift process control systems to ensure process repeatability and reproducibility. The model also features an accessibility for remote operation and monitoring. The equipment can be fitted with a built-in Ethernet or RS232 Interface for communication and control. This gives the user the flexibility to control the system from a remote location while monitoring the process from the comfort of their own office or home. ULVAC RTA-6000 rapid thermal processor is an excellent choice for high-volume production of high-precision mechanical and electrical components. Its advanced process control technology and wide range of features ensure fast, reliable, and repeatable thermal processes for consistent final product quality.
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