Used AGS PLASMA SYSTEMS MPS-200 #9360790 for sale

AGS PLASMA SYSTEMS MPS-200
Manufacturer
AGS PLASMA SYSTEMS
Model
MPS-200
ID: 9360790
Wafer Size: 8"
Reactive Ion Etcher (RIE), 8".
AGS PLASMA SYSTEMS MPS-200 is a plasma-based reactor designed to control and manipulate the properties of a variety of gases. It is a high-performance reactor capable of producing a wide range of highly energetic particles and singlet oxygen, making it an attractive choice for a variety of research and industrial applications. MPS-200 is a low-pressure, medium-power, direct-current (DC) operated reactor suitable for laboratory use. It is equipped with two independent power supply systems, the arc source and anode power supply; both adjustable and separately. The arc source power supply produces up to 200 amperes of alternating current (AC) and contains provisions for manual and digital adjustments to achieve desired operating conditions. The anode power supply can be set up to 200 volts and 50 amperes (DC), and contains adjustments to adjust for anode and O atom current. Internally AGS PLASMA SYSTEMS MPS-200 utilizes a three-stage diffusion pump with a gas flow of up to 12 liters per minute. The first two stages are designed to ensure that feed gas enters the system in a uniform and homogenous way. The third stage consists of a high-temperature heated coil to ensure the pressurization of the reactor. The entire pressurization and gas flow configuration can be adjusted based on reactant materials and experimentation requirements for both temperature and pressure. MPS-200 has an array of accessories including a variety of probes, samplers, baffles and clamps to control the design and operation of the system. It also contains a cold trap to capture volatile by-products and a heated mirror to separate thermal species. Alongside this, AGS PLASMA SYSTEMS MPS-200 has been designed to accept a variety of connection types for sampling and spectroscopic analysis. Installing and using MPS-200 is straightforward, with user-friendly controls and digital displays for temperature, pressure, and power readings. AGS PLASMA SYSTEMS MPS-200 also has a serial ports for remote monitoring and data acquisition, as well as safety features including a temperature limit switch, pressure limit switch, and an overload protection switch. Overall MPS-200 is an powerful and reliable laboratory reactor that offers users precise control and flexibility across a variety of gas processing operations. The capability of the system is further complemented by its robust accessory set and advanced safety features, ensuring that AGS PLASMA SYSTEMS MPS-200 is ready to face any challenge it may encounter. In conclusion, it is an extremely valuable tool to have in any established research or industrial environment.
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