Used AIXTRON 2400G3 HT #9238884 for sale

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AIXTRON 2400G3 HT
Sold
Manufacturer
AIXTRON
Model
2400G3 HT
ID: 9238884
Vintage: 2007
MOCVD System 2007 vintage.
AIXTRON 2400G3 HT is a 6" horizontal, plasma-enhanced chemical vapor deposition (PECVD) tool that is designed for the production of high-temperature, semiconductor-grade thin film devices. It is a highly efficient and versatileHigh-Temperature system with an excellent track record in the production of dielectric, metal, magnetic and organic layers. With its unique combination of high throughput, low-cooper overhead and superior preciseness, AIXTRON 2400 G3-HT is ideal for high-volume manufacturing in the production of MEMS, Thin Film Solar Cell and OLEDs. 2400 G3 HT is equipped with three advanced plasma generators, which enables superior, repeatable and reproducible process control. This reactor offers up to 6" semi-standard and HPF recipes, an additional baking option and the patented AIXOX-PREPEAK plasma pilot. The single-wafer High-Temperature capability of up to 1000°C offers a wide range of available deposition materials. The reactor's Unique Soft-Start and Soft-Pause technology guarantees homogeneity and compliance across the entire wafer and eliminates potential particle-free issues. 2400 G3-HT also offers a variety of automated processes such as film thickness, sheet resistance and reflectance measurements, as well as additional tools for the optimization and control of the high-temperature deposition process. Advanced diagnostic tools, including Spectral Emission analysis, help identify deposition parameters, such as thickness uniformity and process repeatability, to optimize results. In addition, 2400G3 HT allows for the application of high Throughput High Temperature Processes (THPTs), such as single-wafer processing, roll-to-roll and tape-to-tape processing, as well as batch and blanket processing. This has proven to be extremely useful for increasing throughput. Overall, AIXTRON 2400 G3 HT is an ideal system for producing high-temperature, semiconductor-grade thin films. With its combination of superior process control, high efficiency and wide capability range, it helps industry experts optimize time-to-market and reduce costs.
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