Used AIXTRON AIX 2400 G3 HT #9287470 for sale

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Manufacturer
AIXTRON
Model
AIX 2400 G3 HT
ID: 9287470
Wafer Size: 4"
Vintage: 2000
MOCVD System, 4" SiC Does not include disk or satellites 2000 vintage.
AIXTRON AIX 2400 G3 HT is a metalorganic chemical vapor deposition (MOCVD) reactor. It is used to deposit ultra-thin layers of semiconductor materials such as GaN and GaAs for the microelectronics and optoelectronics industries. This reactor uses a horizontal tube (HT) MOCVD configuration, in which the growth chamber is mounted horizontally, allowing for easy maintenance and improved process control. It has a fully automated lift equipment for easy access to the process chamber and the transportation of wafers and substrates. AIXTRON AIX 2400 G3 / HT is equipped with a quartz ultra-snowcap susceptor that heats up to 1000°C and a temperature control system with CAE scanning capability. It is designed to meet the high rate deposition process requirements of III-V compound semiconductor materials such as gallium nitride and gallium arsenide. It has excellent uniformity in deposition and is capable of depositing layers in the range of 5 - 200 nm. AIX 2400 G3 HT is also capable of accommodating various types of liquid delivery systems for the delivery of liquid precursors, such as dopants and passivators. The reactor uses a fast-dissolving carrier gas such as nitrogen to ensure a homogeneous and continuously stable flow of the precursors. This enables a stable process control with consistent film quality and reduces waste of precursors. AIX 2400 G3 / HT also features a unique exhaust unit to reduce contamination levels. This exhaust machine includes an additional gas scrubber and a filtration tool for removing hazardous materials from the chamber. This allows for a safe and clean environment in the growth chamber and provides stable process control. AIXTRON AIX 2400 G3 HT is an efficient, reliable, and cost-effective reactor for production of various optoelectronic and microelectronic devices. It has robust design and can operate stably and reliably in a manufacturing setting. With its advanced process control and monitoring capabilities, it is suited for the production of high-quality products.
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