Used AIXTRON AIX 2600 G3 HT #293592763 for sale

AIXTRON AIX 2600 G3 HT
Manufacturer
AIXTRON
Model
AIX 2600 G3 HT
ID: 293592763
MOCVD System.
AIXTRON AIX 2600 G3 HT is a chemical vapor deposition (CVD) equipment for the growth of thin films and nano structures of materials. It is ideal for research and development projects in the fields of materials science, optoelectronics, semiconductor and micro systems technology. AIX 2600 G3 HT is a hexagonal, horizontal reactor with a four-arm geometry, allowing up to six process cells to be operated simultaneously. The individual cells are designed to be compatible with varying source materials and have a uniform temperature distribution with low vertical temperature gradients. Each cell has an independently controlled bottom-source, middle-source and top-source, including a vertical solid source manipulation system. The unit is equipped with a RF/DC plasma generator, which uses a combination of radio frequency (RF) and direct current (DC) to create a plasma. The RF/DC can increase process repeatability, particularly for deposition rates, layer uniformity and growth rates. AIXTRON AIX 2600 G3 HT has a temperature range of 10° to 350°C and allows the user to select from four different levels of temperature uniformity. A maximum rotating speed of 300rpm ensures good uniformity of the temperature profile. The temperature of the individual source materials is independently adjustable and closely monitored by the machine. The deposition rate of AIX 2600 G3 HT ranges from 0.2 to 3.0nm/s and the pressure range is from 0.2 to 3.0 torr. The tool comes with a fully integrated process control asset that monitors the process variables to give maximum control over the materials being processed. AIXTRON AIX 2600 G3 HT has several safety features, including an emergency shut off model, automatic argon purging, air sampling and a dry exhaust equipment. This ensures that the system is safe to use and that the quality of the process is maintained. Overall, AIX 2600 G3 HT is an efficient and versatile unit for material science and optoelectronics applications. It delivers high uniformity, repeatability and speed, making it an ideal choice for research projects.
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