Used AIXTRON AIX 2800 G5 HT #9384948 for sale
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ID: 9384948
Wafer Size: 2"-6"
Vintage: 2011
MOCVD System, 2"-6"
GaN
Main pump: EBARA ESA80W-HDF
(2) Scroll pumps
RF Generator
Hydried line: NH3-1, NH3-2, SiH4
Chamber: 56x2''/ 8x6''
Temperature monitors:
Photrix LWL Luxtron
EpiTT x G5 x 405 nm
MO Sources:
TMGa-1
TMGa-2
TMAl-1
Cp2Mg-1
Cp2Mg-2
TMIn-1
TMIn-2
TEG-1
TEG-2
Power supply: 400/230 VAC, 3-Phase, 4-Wires+ground
2011 vintage.
AIXTRON AIX 2800 G5 HT is a production-scale, commercial deposition equipment designed to enable the fabrication of high-quality wire grid polarizers (WGPs) and other thin film based optical components. It is a high-temperature, hybrid tool, capable of performing chemical vapor deposition (CVD) of III-V materials at temperatures up to 1000°C and direct-write e-beam evaporation of metals, oxides, pigments and dielectric layers. AIXTRON AIX 2800G5 HT includes a high-performance three-level purge system, a fast-DC power supply, and a high-precision deposition head with up to four spindles. The unit is equipped with AIXTRON proprietary faceting blade holders, designed to enable multi-angle deposition of WGPs, as well as post-deposition etching and surface polishing of the finished product. The machine also features a fully-automated, extremely precise, robotic arm for material loading, unloading, and substrate-to-substrate transfer. AIX 2800 G5 HT combines a compact, high-throughput design with a sophisticated, advanced control unit. Its user interface is extremely user-friendly, allowing for intuitively guided setup and rapid substrate batch processing. The tool includes an integrated data collection and analysis suite, as well as cutting-edge automated power control for manual or fully automated recipe management. Its powerful diagnostics module enables complete in-situ monitoring of critical parameters and on-the-fly defect detection and correction. The fully automated process delivery systems guarantee precise, repeatable thin-film deposition processes, and fast tuning and development across different materials and application specific process conditions. This high- temperature, precise, and powerful deposition asset makes AIX 2800G5 HT the perfect tool for many ultra-high accuracy optical thin-film coatings applications, such as WGPs, as well as many other thin-film intensive applications. Its superior manufacturing capabilities and precise materials manipulation capabilities allow users to fabricate some of the most precise, optically precise components on the market today, making this model essential for thin-film producers who require the highest quality products.
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