Used AIXTRON AIX G5 HT #293594749 for sale

AIXTRON AIX G5 HT is a high-throughput reactor designed to boost production capacity for the production of compound semiconductor materials. The reactor is based on the advanced technology of hot-wall CVD, which allows for high-quality and high-yield production of epitaxial layers for compound semiconductor applications. The equipment offers several unique features, such as programmable gas composition settings, independent flow control for each gas, and programmable zone temperatures for customising the process conditions. The reactor is equipped with a heated chuck for substrate heating, a hot wall in the process area and a vertical furnace-loading mechanism, providing an ideal platform for repeatable and reliable production of compound semiconductor layers. The reactor has been designed to specialise in the production of materials such as AlGaAs, AlInAs and InGaAs, which require complex process recipes with fine adjustment of gas composition, gas flow rates and temperature. AIXTRON AIX G 5 HT reactor is capable of providing a homogeneous substrate temperature across the hot wall, which helps to keep the process parameters under control and ensure repeatability of the process results. Furthermore, the tool is fitted with a modular scanning system and an advanced wafer recognising unit, which allows for automatic wafer recognition, thus providing considerable time savings in switching between processing recipes. AIX G5 HT provides excellent temperature control in its process area, with zones that can be adjusted to within 0.1°C. The machine also offers high-precision control for up to four gases, allowing for finely-tuned process conditions for the production of delicate compounds. With an optional tube furnace addon, AIX G 5 HT can also be used for liquid phase epitaxy, allowing for further tailoring of the process conditions to match the needs of a particular compound semiconductor. AIXTRON AIX G5 HT has been designed for high-volume applications, suiting the needs of industrial mass-production. With its high-performance gas control, homogenous temperature profile, and process automation features, AIXTRON AIX G 5 HT is the tool of choice for large-scale compound semiconductor production.