Used AIXTRON Crius-R #9260376 for sale

AIXTRON Crius-R
Manufacturer
AIXTRON
Model
Crius-R
ID: 9260376
Wafer Size: 12"
Vintage: 2012
MOCVD System, 12" 2012 vintage.
AIXTRON Crius-R is a type of epitaxial reactor designed and developed by AIXTRON for production of high-purity compound semiconductors. These semiconductors include various gallium arsenide (GaAs), indium phosphide (InP), and aluminum gallium arsenide (AlGaAs). The reactor allows for a wide range of growth parameters, and is designed for both production-scale and research-grade applications. Crius-R epitaxial reactor does not use an internal susceptor, which makes it better suited for producing high-quality epitaxial layers. It also does not require warm-up or cooldown time prior to and after the growth process, enabling high throughput for large production quantities. In addition, due to the reactor's efficient design, it offers a high degree of process repeatability and reproducibility. AIXTRON Crius-R epitaxial reactor is equipped with a unique quartz crystal microbalance (QCM) sensor which allows for endpoint detection of epitaxial layers. This improved endpoint detection allows for improved control over the growth process, increasing the quality of the grown layers. Crius-R also features innovative gas inlets and independent control, which are crucial in producing the desired epitaxial layer. In addition, the reactor offers an integrated cool-down module, which reduces the growth temperature dramatically and significantly improves the lifetime of the substrates. AIXTRON Crius-R epitaxial reactor has a number of integrated safety features to reduce the risk of dangerous situations during operation. The reactor also includes various diagnostics to monitor the growth process to assure high-quality results. In conclusion, Crius-R epitaxial reactor is designed for both production-scale and research-grade applications, providing researchers and engineers with an efficient and reliable tool for development and manufacturing of high-purity compound semiconductors. Its integrated safety features and QC sensor provide maximum control over the epitaxial process, and enable high-level of repeatability and reproducibility.
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