Used AIXTRON Crius #9299684 for sale

AIXTRON Crius
Manufacturer
AIXTRON
Model
Crius
ID: 9299684
MOCVD Epi reactor.
AIXTRON Crius is an advanced-technology, multi-wafer, chemically-assisted, chemical vapor deposition (CVD) equipment with a range of precise control options. It is designed to help users deposit thin film materials onto substrates of different sizes, such as wafer substrates, flexible tapes, and even large substrates (up to 594mm). Crius is a multi-source, multi-zone reactor, meaning the entire deposition process is controlled within the same reaction chamber. This allows for precise deposition of the thin films at different temperatures and deposition rates. The system also features real-time temperature monitoring, and efficient temperature control capability. AIXTRON Crius uses a range of chemical sources, including hydrogen, helium, nitrogen, and other gases, as well as reactive elements including silicon, carbon, and tungsten. This allows it to deposit a variety of materials, such as ultra-thin films for electronics and photonics applications. The unit also provides precise control over reaction parameters, such as gas flow rates, reaction time, and wafer temperature, allowing for uniformity across a wide variety of substrates. Crius' deposition chamber is designed for enhanced uniformity and repeatability, ensuring that the same exact parameters are used for each deposition cycle, producing consistent results every time. This chamber contains a quartz reactor window with advanced optical emissions monitoring capabilities, allowing for detailed analysis of the deposition layers. The machine also contains a range of sensors, allowing for monitoring and control of the tool, so that it is running at peak efficiency and maximum safety levels. Alarms are in place to alert operators of any potential abnormalities or potential threats to the asset's operation. Overall, AIXTRON Crius reactor is a powerful and reliable model that provides precise deposition and uniformity across a wide variety of substrates, giving users greater control over the materials being used and producing consistent results each time.
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