Used AIXTRON G5 HT #9256337 for sale
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ID: 9256337
Vintage: 2012
MOCVD System
Capacity: 56x2", 14x4", 8x6"
Wiring: 4-Wire with ground
Hydride line: NH3-1, NH3-2, SiH4
MO Source: TMGa-1, TMGa-2, TMAl-1, Cp2Mg-1, Cp2Mg-2, TMIn-1, TMIn-2, TEGa-1, TEGa-2
MFC: Horiba
Temperature monitor: EPI TT
Power supply: 400 / 230 V AC, 3 Phase
2012 vintage.
AIXTRON G5 HT is a high-temperature reactor made by AIXTRON, a leading manufacturer of advanced technology deposition systems. AIXTRON G5HT is an advanced epitaxy tool designed for large-area semiconductor device applications such as Power MOSFETs, high- performance power electronics, and High Electron Mobility Transistors (HEMTs). G5 HT can maintain a process temperature up to 1045°C and offers precise temperature control. It is equipped with various equipment features, such as automatic pressure control and high pressure flushing, to ensure high quality thin film deposition processes. At the heart of the system are the susceptor, quartz halogen lamp and RF generator. The susceptor is designed for easy loading and unloading during operation. It has a temperature range of 300-1300°C and uses a combination of infrared and halogen lamps for heating. The quartz halogen lamp provides focused, concentrated heating and is easily adjustable to provide a smooth heating pattern. The RF generator provides additional heating power and can be used to generate plasma processes for increased deposition rates and improved process performance. G5HT utilizes AIXTRON proprietary gas delivery unit, allowing for the delivery of a wide range of precursor materials without the need for auxiliary gas lines. This allows for complete flexibility in the type of material that can be deposited. Additionally, AIXTRON G5 HT can perform Thick Film Gallium Nitride doping, enabling the fabrication of high electron mobility transistors (HEMTs). The advantages of AIXTRON G5HT include its high temperature capabilities, its ability to deposit a wide range of materials, its efficient gas delivery machine, and its precise temperature control. G5 HT is a reliable, cost-effective, and easy-to-use tool, making it an excellent choice for semiconductor device fabrication.
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