Used AIXTRON G5 #293601017 for sale

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Manufacturer
AIXTRON
Model
G5
ID: 293601017
Vintage: 2012
Metal Organic Chemical Deposition (MOCVD) system 2012 vintage.
AIXTRON G5 is an advanced Horizontal Reflow (HOR) reactor designed specifically for the production of compound semiconductor materials. This reactor is capable of handling a variety of deposition processes from molecular beam epitaxy (MBE) to metal-organic chemical vapor deposition (MOCVD). At the heart of AIXTRON G 5 is the unique combination of patented insulation, conveyor equipment and vertical cold wall. By separating the process chamber from the hot zone by these components, a stable environment is created for the deposition of compound semiconductor materials. The main feature of G5 is its large chamber design, measuring over 2.4m in diameter. This gives the user the advantage of being able to accommodate numerous substrates and material sources at the same time which maximizes process efficiency. To manage this large chamber, it is divided into two functional levels, which can be arranged in different configurations to suit any specific deposition process. The upper level is used for the introduction of source material and the lower level is used for the recovery of the resulting product. Another key feature of G 5 is its patented insulation system. This unit consists of non-metallic material applied to all inner chamber walls, helping to reduce thermal loss to the substrate support systems. As a result of this insulation machine, AIXTRON G5 is able to keep the working temperatures up to 10x higher than those of a conventional horizontal reactor. The advanced vertical cold wall tool of AIXTRON G 5 further optimizes the environment of the process chamber. This ingenious feature helps to reduce temperature changes between wafer cassette processing and other substrates, enabling better control over the overall growth process. Adjustments to the cold wall angle, temperature and flow rate can be manually changed to suit any process requirements. Finally, G5 also features a custom-designed conveyor asset which makes material handling and loading simpler and more efficient. This conveyor model is also fully automated, allowing for remote control of the reactor's temperature profile, gas control and other settings. G 5 is thus a reliable and powerful HOR reactor equipment with an impressive range of features and capabilities.
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