Used AIXTRON R6 #9215060 for sale
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ID: 9215060
Vintage: 2014
MOCVD System
31"x 4"
Gas lines:
(2) NH3
SiH4
SMC:
(3) SMC Baths (Small)
(2) SMC Baths (Middle)
SMC Bath (Lager)
(2) EPISON4 Installed (TMIn-1 &TMIn-2)
MO Lines:
(2)TMG
DARK
(3) Cp2Mg
(2) Indium
TEG
MO Materials:
TMG
DARK
Mg
In
TEG
SiH4
NH3
Measure reflectance & temperature: Epi 3TT, EpiCurve_TT, Argus
Process pump: AD600H
WKL230 Chiller included
HORIBA STEC
Gas: GaN
2014 vintage.
AIXTRON R6 is a mono-zone-arc Reactor that was developed by AIXTRON, a leading German manufacturer of deposition systems. This reactor was designed for deposition of organic thin films and low temperature CVD applications. It features a deposition chamber with a working volume of 500mm x 400mm, a round inner wall design, a one zone arc plasma source, and up to 200W power for dual zone applications. It has a high temperature range from 20-480°C with a baking temperature up to 600°C. This reactor offers a variety of benefits for deposition of high-performance dielectric and organic semiconductor films. The large working volume is able to accommodate up to two substrates of various shapes and sizes. It uses a dual-zone setup to ensure efficient thermal management during deposition processes. This prevents heat build-up in the reactor chamber and ensures high uniformity of the deposition. Furthermore, the one-zone-arc plasma source, which is located above the sample, creates a uniform plasma field with a high density. This helps to achieve large film thicknesses at relatively high deposition rates. In addition, R6 is easy to operate and maintain. It is equipped with advanced diagnostics and visual indicators, which enable users to easily monitor the plasma and deposition process. Moreover, the reactor has a modular design that makes it easy to change and maintain the deposition system. It is also equipped with safety features such as overvoltage protection and arc detection. Because of its advanced features, AIXTRON R6 is ideal for the deposition of OLEDs, organic thin film transistors, sensors, displays, and other organic thin film devices. It has been successfully used for the production of commercial devices, and has also been used in projects that study the corrosion properties and structure of organic films.
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