Used AIXTRON TS 19x2" FT #9135813 for sale

AIXTRON TS 19x2" FT is a state-of-the-art fluorinated-thiophene based multi-reactor chamber equipment designed for complex high-yield thin film fabrication processes. This system is powered by AIXTRON advanced modulated electron cyclotron resonance (ECR) source technology which allows efficient layer deposition at high temperatures. This type of reactor uses a combination of ECR microwave produced plasma and thermal processing for efficient layer growth. The reactor incorporates a 20" wide vacuum chamber and offers processing capabilities up to 2900 °C. This reactor is equipped with an in-situ gas purification and analytical component to ensure a stable and repeatable process. TS 19x2" FT uses a vacuum pumping unit, which is able to maintain a process pressure of 1x10-7 Torr to 1x10-10 Torr. It is able to function under a wide range of gas species, either as part of a pre-purge process or as part of a continuous flow. AIXTRON TS 19x2" FT provides efficient substrate heating and a wide range of uniform layer deposition capabilities. Substrates can be heated up to 600 °C to ensure efficient growth. The reactor also offers a robust source improvement factor (SIF) of up to 100, meaning it is able to deliver extremely uniform deposition of layers on substrates. Furthermore, this machine can operate in recirculating gas mode, allowing for improved process control and cost-efficiency. TS 19x2" FT is suitable for a wide range of thin-film fabrication processes including those used in the production of opto-electronics, semiconductors and photovoltaic devices. Its highly reliable and repeatable capabilities make it the perfect choice for high-demand manufacturing applications. Power consumption and operating costs are also minimized thanks to its advanced ECR source technology. The tool can also be integrated with AIXTRON advanced process monitoring software, allowing for full process monitoring and control. AIXTRON TS 19x2" FT is an ideal choice for both research and industrial applications.