Used AMAT / APPLIED MATERIALS 0010-03254 #293769609 for sale

AMAT / APPLIED MATERIALS 0010-03254
ID: 293769609
MCA E-Chuck assembly.
AMAT / APPLIED MATERIALS 0010-03254 is a a production-level, high-efficiency PVD reactor designed for sputtering thin films of various materials. AMAT 0010-03254 is a stand-alone, 300mm wafer cassette-to-cassette tool, offering high-performance sputtering deposition and the ability to deposit multiple metal and metal-oxide material layers simultaneously using independent process chambers. The PM chamber is equipped with a unique "Rotating Magnetron Source," which enables its use with a variety of target materials, including traditional planar targets and cylindrical targets, to create uniform layer thicknesses. Additionally, it is equipped with an enhanced rotating target management equipment (ETM) to improve site-level control and uniformity, as well as improved load lock design to reduce particle contamination. Control of the reactor is achieved through the use of a dedicated front-end automation and control system. The unit facilitates rapid setup and recipe optimization, offers statistically-controlled quality assurance, and utilizes hot wafer loading. This offers the benefit of minimizing damage to fragile reactant gases while simultaneously reducing maintenance cost and consuming less energy. Moreover, the machine supports both single-chamber and multi-chamber operation, allowing for flexible process intensification. In terms of its mechanical design, APPLIED MATERIALS 0010-03254 has been equipped with an advanced pump-down architecture to allow for fast equipment changes and tool maintenance. Additionally, the tool is capable of using advanced diaphragm and backing pumps for creating high vacuum levels in the deposition chambers. Further, the reactor is equipped with high-precision drive systems, optimized gas distribution, and improved gas scavenging for improved performance and efficient film deposition. At the core of 0010-03254 reactor is AMAT proven MDP4 (Maximized Data Processing for four chambers) controller platform. This platform enables elegant recipe management, with statistical process control and higher-level yield optimization. Furthermore, the MDP4 controller also enables trend analysis and custom-analytics, allowing operators to generate powerful insights on the mechanism and behavior of materials under process. In summation, AMAT / APPLIED MATERIALS 0010-03254 is a powerful, production-level PVD reactor with excellent performance and process flexibility. Its combination of advanced mechanical design, automation, and control tool makes it an ideal tool for rapid deposition of thin films and the deposition of multiple layers of specific metals and metal-oxide materials simultaneously. As such, AMAT 0010-03254 reactor is ideal for a variety of sputtering applications.
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