Used AMAT / APPLIED MATERIALS 0010-09750 #9410316 for sale
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AMAT / APPLIED MATERIALS 0010-09750 is an incorporated plasma etch/cleaning reactor designed to achieve an optimal electron attachment level and gas flow rate that is critical to plasma etching processes. This system is used to clean and etch substrates within semiconductor fabrication. AMAT 0010-09750 is an all-in-one reactor that is designed to provide an integrated power supply source, vacuum control and temperature control, allowing for a stable, high precision etch process. It utilizes an induction coil to create and maintain a consistent, high level plasma by sustaining the in-situ electron attachment. Additionally, the RF power of the induction coil is adjustable, and the gas flows form the vessel can be tuned/measured with a mass flow controller. The dimensions of0010-09750 measure 28 inches wide, 49 inches deep, and 79 inches high. The reactor is primarily constructed of stainless steel and features a flat top plenum and two semi-circular chambers. This allows for the efficient quenching of plasma and Etch rates. The vacuum environment of the reactors is created by a combination of mechanical and turbo-molecular pumps and the chamber is maintained in a state of high vacuum, allowing the optimized plasma processing of substrates. The inside chamber of APPLIED MATERIALS 0010-09750 is coated with a material that is resistant to the etch process and works to reduce sticking of products and the like along the reactor walls. Additionally, the floor is beveled to maximise the usage of the chamber space. Finally, allowing for temperature control is a high wattage custom water cooling system. This dramatically reduces the heat generated during etching, allowing 0010-09750 to effectively perform the etch process on a wide range of substrate materials. In summary, AMAT / APPLIED MATERIALS 0010-09750 is an ideal tool for plasma etching/cleaning for the semiconductor industry. Its combination of inductive power source and vacuum control along with the stainless steel construction and customised cooling system ensures that the plasma processing is both safe and effective.
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