Used AMAT / APPLIED MATERIALS 0010-27430 #293799036 for sale
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AMAT / APPLIED MATERIALS 0010-27430 is a multi-zone low-pressure chemical vapor deposition (LPCVD) reactor. The reactor uses an in-situ four-zone hot-walled Torch system to generate thin film deposition layers of polysilicon, silicon nitride, and silicon oxide materials. The reactor offers superior uniformity and thickness control due to its multiple zones and high-temperature accuracy. The reactor consists of a central vacuum chamber that is equipped with four symmetrically aligned processing zones. Each zone is composed of a ceramic heat exchanger, support rods, and a process chamber. The ceramic heat exchanger contains an inert atmosphere of hydrogen and nitrogen MFC for precise temperature control across all zones. The support rods support the process chamber, which consists of an inner processing tube, and an outer quartz tube. The quartz tube is heated externally and is also used for monitoring and controlling the temperature of the inner tube. The reactor also contains a number of other components, such as reaction injectors and mass flow controllers. The injectors are used to inject the gases needed for the LPCVD deposition process. The mass flow controllers are used to monitor and adjust the flow rates of the various gases, as well as the temperatures of all zones. The reactor also contains a Low Pressure Gauge, an Inert Gas Purge Assembly, and a Gas Diffusion Panel. The reactor uses high-pressure hydrogen and nitrogen to limit oxidation and provide better material quality. It also utilizes an automated tube cleaning process that reduces the need for constant manual cleaning and maintenance of the reactor. Additionally, the temperature accuracy is provided by a number of temperature sensors located throughout the reactor. The reactor is designed for the deposition of semiconductor films with precise thickness and uniformity. It is also highly reliable and can offer up to 50 percent reduction in material waste. The reactor has also been designed to minimize operator intervention and ensure repeatability and consistent production quality. The reactor can be used for the fabrication of logic devices, memory devices, and other highly precise and stringent components for a wide range of industries.
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