Used AMAT / APPLIED MATERIALS 0010-30686 #119697 for sale

AMAT / APPLIED MATERIALS 0010-30686 Reactor is an advanced CVD (chemical vapor deposition) tool that provides a complete thermal CVD process to engineer coatings and microstructures. The equipment is built on a modular platform that enables researchers to design solutions to meet their most demanding process requirements. AMAT 0010-30686 Reactor offers a wide range of process capabilities, including standard process temperatures ranging from room temperature to 1000C and process pressures from 10-200 mTorr. This system is ideal for research applications that require highly controlled thermal CVD processes and/or very high temperatures. APPLIED MATERIALS 0010-30686 Reactor includes an octagonal, dual-zone reactor furnace for single-wafer or batch processing, together with a gas distribution manifold for up to eight process gases. On-board process monitoring equipment helps ensure repeatable, reliable processes from run to run. In addition, real-time control of process parameters allows users to optimize the deposition process for specific targets, such as film thickness and film uniformity. The chamber of 0010-30686 Reactor is constructed from 95% Alumina, making it ideal for compatibility with a wide range of process atmospheres and chemistries. The chamber also contains a 3-Kilowatt RF generator which is used to deliver the energetic plasma required for some processes. The radiant heat generated by the RF generator can be used to achieve the highest deposition temperatures or to maintain an isothermal process, depending on the demands of the end-user. Safety and maintenance features set AMAT / APPLIED MATERIALS 0010-30686 Reactor apart from other systems, with features such as a front-loading wafer shuttle, and a process offload unit to reduce loading and unloading times and improve operational safety. The reactor has an integrated maintenance machine, and a comprehensive data logging feature to track process events. Finally, the tool can be powered up and down remotely with a button keypad from the control console. AMAT 0010-30686 Reactor is a powerful and versatile CVD tool for high temperature and/or high texture process engineering and R&D. The modular platform of this asset allows flexible and intuitive end-user setup, so that it can be tailored for a variety of processes with different processing atmospheres and chemistries. Research applications that depend on creative process engineering can benefit from the precision control, robust safety features and repeatable performance of this advanced thermochemically-controlled reactor.