Used AMAT / APPLIED MATERIALS 0010-75005 #9087782 for sale

ID: 9087782
NB Chamber and door assembly Right DLL.
AMAT / APPLIED MATERIALS 0010-75005 Reactor is a workhorse model of process reactor designed for medium- to high- volume production of chemical and/or semiconductor applications. It provides a dedicated workspace for all the necessary process steps in semiconductor fabrications up to 8 inches wafers. This equipment is designed to help streamline the process by allowing multiple modules to be integrated into one unit, creating an efficient and cost-effective production cell. AMAT 0010-75005 Reactor is equipped with a high quality quartz, pyrex, or alumina reactor chamber for various gas flows and temperatures. All the modules in the system are integrated with temperature sensors that allow for excellent thermal control and consistent repeatability of the desired process parameters. It includes a turbomolecular in-situ pump, creating a high-quality ultrahigh vacuum environment and preventing outgassing and other undesired phenomena. The main components of this unit include: Robot Loader: A computer-controlled automatically load and unload machine to manage the wafers in the process chamber. Controller: This includes a Human-Machine Interface (HMI) for data entry, a Recipe Editor for establishing process parameters, a Central Process Controller (CPC) for controlling the processes, and a Software Tool Kit to help customize functions. Reaction Chamber: This has a wide range of options for enabling a variety of process applications. It is equipped with a heated dome, electric injector heater, and process port technology, allowing for fast, repeatable results. Gas Distribution Tool: This includes a high-precision pressure regulator, mass flow controllers, and other gas systems to ensure accuracy and reproducibility in the gas distribution to the reaction chamber. Sputtering Source: This includes a range of sputtering source options, including planar guns, rotating cylinders, and rotating targets for various applications. In-situ Film Thickness Monitor and Contamination Monitor: This monitors provide real-time feedback on the parameters in the reaction chamber. Viewport: This viewport provides a clear view into the reaction chamber, helping to minimize process variability. APPLIED MATERIALS 0010-75005 Reactor is fully automated and can accommodate multiple process steps. This asset allows for quick and easy sets-up with instant feedback on the process conditions. It can be used for a variety of temperature and pressure applications, and is uniquely designed to offer flexibility and repeatability. 0010-75005 Reactor is an excellent choice for medium- to high- volume production requirements.
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