Used AMAT / APPLIED MATERIALS 019009275 / 019009272 #293658103 for sale
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AMAT 019009275 (photoresist asher) and APPLIED MATERIALS 019009272 (photoresist etcher) are reactors used in the production of semiconductor devices on the industry-standard 300-millimeter (12-inch) wafers. These reactors use high temperatures and precise process control to clean and etch materials that are used in high-tech chip fabrication. The 019009275 photoresist asher is a single-wafer, atmospheric-pressure oxidative asher used for the removal of photoresist on semiconductor wafers. It has a highly uniform, large-capacity gas distribution equipment that ensures a homogeneous operating atmosphere throughout the chamber. The silicon chamber uses a high-temperature, direct-loading, forced-convection system that enables faster high-temperature processing. It can also automatically preheat the substrate before processing to reduce thermal stress. The 019009272 photoresist etcher is a single-wafer, electrostatic-focusing, high-vacuum etch reactor. It removes photoresist from substrate surfaces to prepare for ion implantation, as well as forming patterns for integrated circuit fabrication. It has a highly uniform gas distribution unit which ensures a homogeneous operating atmosphere, and a forced convection delivery machine to allow more efficient gas delivery. The chamber also features cooling-pin holders to help maintain wafer temperatures, and dynamic substrate bias to help control etch rate and uniformity. Both processes feature automated, real-time process monitoring to ensure process uniformity across multiple wafers, and advanced diagnostics for analysis of running processes. The process end-point detection tool also helps to reduce antireflective coating (ARC) break-down, while the post-etch cleaning asset helps reduce oxide residue on wafer surfaces. AMAT / APPLIED MATERIALS 019009275 and the 019009272 are a reliable, highly uniform, and efficient platform for the processing of semiconductor wafers. They offer reliable high-throughput manufacturing processes for chip manufacturing, making them ideal for the fabrication of high-tech chips.
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