Used AMAT / APPLIED MATERIALS (2) Chambers for Endura #293667135 for sale
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AMAT (2) Chambers for Endura are a customizable ultrahigh vacuum chamber intended for a variety of R&D and production process applications in the semiconductor industry. This precise and reliable chamber set was designed to serve the needs of a demanding semiconductor environment. APPLIED MATERIALS (2) Chambers for Endura are comprised of two separate chambers—a main process chamber and a backside process chamber. The main process chamber is a large-dimension chamber with a capacity of 4.8 liters (1.3 gallons) and a volume of 3.15 cubic meters (1.2 cubic feet). It features an all-metal construction made from 304 stainless steel and is equipped with a precision-controlled heating element for temperature control. The chamber also supports a host of vacuum pumps including turbomolecular pumps, scroll pumps, cryopumps, turbo-drag pumps, and ion pumps, so you can choose the best possible vacuum solution for each job. The second chamber—the backside process—is an enclosed chamber of reduced size and is typically used for etching and sputtering. It features a volume of 0.21 cubic meter (0.07 cubic feet) and offers temperature control up to 500°C. It has a double-wall stainless steel construction and is equipped with a custom-made electrode that is suitable for the application of plasma-assisted etching processes. AMAT / APPLIED MATERIALS (2) Chambers for Endura are typically connected to your existing vacuum system, allowing you to streamline your existing processes while ensuring a high level of precision and uniformity. The chamber set is also equipped with safety features such as an emergency stop switch, grounding connection, fume hoods, and safety light curtains. The end result is a powerful and reliable tool perfect for many R&D and production process applications. The chamber set is built to last and its precision-controlled heating system ensures consistent results, making it the logical choice for the demanding requirements of the semiconductor industry.
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