Used AMAT / APPLIED MATERIALS 3500 #9379475 for sale
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ID: 9379475
Vintage: 2008
PECVD System
G-SiO
(4) Heat chambers
(4) ADVANCED ENGERY RF-50SWC RF Generators
Heat exchanger
Scrubber
(4) DC Power supplies
Pump:
ALCATEL ADP 122L
EBARA A200W.
AMAT / APPLIED MATERIALS / AKT 3500 is an advanced silicon-based chemical vapor deposition (CVD) reactor. Designed to enable high throughput manufacturing of advanced lighting, optical, semiconductor and optoelectronic components, AKT 3500 is a unique advanced deposition tool. It offers highly repeatable, reliable and efficient processes for deposition of hard and durable materials on a variety of materials ranging from glass to metal to semiconductor materials. AMAT AKT-3500 is designed to make the most of AKT proprietary Advanced Low Temperature (ALT) process. This process uses multiple levels of heated substrates and allows for the deposition of silicon at lower temperatures, allowing for more comprehensive control over the deposition process. APPLIED MATERIALS 3500 is capable of achieving an ultra-thin deposition of metal and nitride layers, necessary for applications such as light guide plates and optical components. AKT AKT-3500 is built on a novel atmospheric pressure deposition equipment. It is a gas-flow deposition system, based on a unique design that utilizes multiple deposition sources, precisely controlled gas flows and a unique electrostatic filter unit for high throughput film growth. This enables excellent uniformity of the deposited layers compared to conventional CVD systems. AMAT / APPLIED MATERIALS / AKT AKT-3500 machine also features a newly developed sequential shutter control tool. This enables multiple individual steps in the deposition process to be convened with increased accuracy and control. This combined with an integrated heating/cooling asset offer optimum resilience and throughput for delicately tuned process parameters. APPLIED MATERIALS AKT-3500 is a versatile reactor, enabling a variety of deposition configurations. It is ideal for optoelectronic applications such as LEDs, light guides, optical components and more. With the capability to deposit a variety of materials and control deposition properties, AKT-3500 reactor can provide excellent results.
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