Used AMAT / APPLIED MATERIALS 3500 #9380506 for sale

ID: 9380506
PECVD System.
AMAT / APPLIED MATERIALS / AKT 3500 is a third generation reactive ion etch (RIE) reactor designed to provide superior etching performance as well as enable a wide range of process capability. AKT 3500 is a parallel plate etcher designed for the production of ultra-high precision dielectric, metal, and hard mask features with its proprietary planar gas distribution technology. Customized horizontal and vertical gas configurations enable a wide range of process capability. This includes modern wet etching, anisotropic etching (RIE), deep silicon etching, and undercut etching of metal and dielectric layers. Additionally, AMAT AKT-3500 features automated pad cleaning to reduce cleaning times and improve etch uniformity in the field. 3500 features a load/lock equipment that enables quick loading for easy pipeline changes. The reactor also features advanced pressure control, enabling repeatability of uniform processes over an extended period. Furthermore, AKT-3500 is equipped with a special variable layer system. This unit allows one tool to be used for multiple layers, thus reducing required setup time and eliminating extra loading between layers. The machine also allows for improved process stability on thin layers. Additionally, AKT AKT-3500 features an in-situ heating tool which enables optimized etch temperature for improved process control and accuracy. APPLIED MATERIALS 3500 has proven to be a highly reliable and user friendly piece of machinery that has become very popular among semiconductor fabricators and manufacturers worldwide. The asset is also designed for simple and intuitive operation, with the goal of increasing efficiency and throughput. To conclude, AMAT 3500 is a reliable and versatile reactor that allows users to perform a wide range of etching processes. Its patented planar gas distribution technology offers excellent etching performance, while its load/lock model, variable layer equipment, and in-situ heating system further enhance the unit's performance and application capabilities. The machine is also user friendly, easy to operate, and highly reliable.
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