Used AMAT / APPLIED MATERIALS 3500 #9380513 for sale

AMAT / APPLIED MATERIALS / AKT 3500 is a high-performing inline plasma etch/clean process equipment designed for etching and cleaning processes in the microelectronics industry. The system utilizes an advanced plasma control module to provide precise control of the reactive ion etching (RIE) process, resulting in superior uniformity and repeatability of the etch process. The unit is composed of several sub-components, including a plasma generator, an automated load-lock, an adjustable pressure/flow controller, a platen heater to heat wafers, embedded RF and DC sources, and a vacuum chamber with differential pumping. The plasma generator in the machine utilizes a set of pumping elements to create a stable dielectric vacuum chamber at pressures up to 0.2torr, and is capable of producing both plasma-on and plasma-off states during the etching process. The plasma generator is also capable of delivering a wide range of film composition, chamber pressure, and temperature. The tool includes an automated load-lock for efficient loading and unloading of wafers, automatically controlling chamber pressure and temperature for consistent etching processes. The pressure/flow controller allows for precise control of the regions of the plasma chamber and the delivery of both raw material gas and ultra-pure etch gas to the chamber. This helps to ensure a uniform distribution of plasma-generated active species throughout the etching process, resulting in superior etch results. The asset also includes a platen heater to heat wafers to ensure uniform etch results, and an embedded RF source for consistent etch-rate control. AKT 3500 is designed to provide consistent, reliable and repeatable etch processes for the microelectronics industry. Its integrated suite of components enable precise control of the reactive ion etching process, yielding superior uniformity and repeatability. With the model's ability to deliver a wide range of film composition, chamber pressure, temperature, and gas delivery, AMAT AKT-3500 provides an effective solution for etch and cleaning processes in the microelectronics industry.