Used AMAT / APPLIED MATERIALS Endura 5500 #9228344 for sale
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ID: 9228344
Wafer Size: 8"
Vintage: 2006
PVD System, 8"
Wafer shape: SNNF
Umbilical length: 25Ft
Front panel type: Painted
Light tower: R / Y / G
Buffer robot: HP + metal blade
Transfer robot: VHP with metal blade
Chamber F: Orienter / Degas
Chamber E: Orienter / Degas
Chamber C: Pre clean 2e
Chamber B: Cool down
Chamber A: Pass through
Chamber 1: Standard body AL4 finger
Chamber 2: SIP_TTN with bias ESC
Chamber 4: TN_Durasource_TTN A101
Includes:
Main body
Chiller
Rack 1
Rack 2
AC Power box 2
AC Power box 1
Cryo compressor / Totes
System power: Variable / 150 kVA
Transformer type: Variable / 150 kVA, 480V - 380V
2006 vintage.
AMAT / APPLIED MATERIALS / AKT Endura 5500 is an advanced processing semiconductor tool that is designed for high-productivity etch and deposition. The equipment provides great reproducibility, high uniformity, and the highest rate of productivity among its class. The tool has two independent chambers, allowing simultaneous etching and deposition processes, as well as remote plasma source operation to provide added flexibility. The built-in process monitoring software allows the operator to regulate both chambers simultaneously, ensuring consistent results. AKT Endura 5500 is equipped with a state-of-the-art multicontroller architecture that integrates the multiple functions of etch and deposition into one integrating system. The ETCH & DEPOSITION (E&D) Exhaust and Process chambers are shared, ensuring high yields and long chamber life. The unit also has a temperature control capability which helps maintain accurate temperatures during the etching and deposition processes. AMAT ENDURA 5500 is built with a large number of specialty features that make it suitable for a variety of applications. It is equipped with an AutoGas™ automated gas delivery machine, providing incremental dilution control and reduced manual labor during process development. The tool also offers low-pressure wafer transfer that has been optimized to minimize the risk of wafer particle generation. APPLIED MATERIALS ENDURA 5500 is an excellent tool for making ultra-thin layers of materials with precise thicknesses and densities because of its super-high-density power deposition capability. The asset is also very efficient in terms of its material utilization, which is a a great advantage for cost savings. APPLIED MATERIALS Endura 5500 has been used to successfully etch and deposit materials such as polysilicon, silicon oxide, aluminum, and copper. It offers users an economical solution for their semiconductor production demands, as well as reliable performance. The tool's long-term reliability and problem-solving capabilities make it a great choice for production-oriented work.
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