Used AMAT / APPLIED MATERIALS AMC 7800 RPX #9293631 for sale

AMAT / APPLIED MATERIALS AMC 7800 RPX reactor is an industry-leading process tool for wafer fabrication that enables operating temperatures at high power levels. It is the highest performer-per-watt reactor among its peers for large-sized chamber systems applications. The reactor combines AMAT proprietary Enhanced Anneal technology and Atomic Layer Deposition to support multi-step process flow with the highest uniformity and deposition rate for advanced low-k and porous-low-k materials. AMAT AMC 7800 RPX reactor is a versatile, cost-efficient tool that is easy to operate and maintain. It offers high throughput levels with a maximum process speed of 80 wafers per hour and is designed for preconditioning, low-temperature annealing, cleaning, film growth, and etching processes. Its load port is capable of handling wafer sizes up to 12 inches (300 mm) in diameter and wafer thickness of up to 4mm. The pre-mixing feature enables superior repeatability for various process steps at optimal conditions. Its environmental sustainability features are powered by APPLIED MATERIALS Enhanced Source Purge (ESP), which decreases particle contamination and ejects gas earlier in the process for a more eco-friendly tool. It also helps to reduce cost of ownership by maintaining long-term reliability and stability with a virtual maintenance program. An integrated Active Contamination Control system provides real-time monitoring of chamber cleanliness and enables automated nitride cleaning. APPLIED MATERIALS AMC 7800 RPX is equipped with Smart Sensing Technology and advanced metrology capabilities offering a complete portfolio of high-resolution diagnostics for real-time process analysis and increased throughput. The closed-loop temperature control optimizes the thermal environment and ensures accurate and repeatable thermal processing for delicate materials. AMC 7800 RPX reactor is ideal for small- to medium-sized semiconductor fabs with tight budgets and limited floor space. Its superior repeatability and performance in combination with high throughput, industry-leading process uniformity, and low cost of ownership make it a great choice for production purposes.