Used AMAT / APPLIED MATERIALS AxZ Chambers for Endura CL #9313565 for sale

AMAT / APPLIED MATERIALS AxZ Chambers for Endura CL
ID: 9313565
Wafer Size: 12"
12" Process: CVD AL.
AMAT / APPLIED MATERIALS AxZ Chambers for Endura CL is a reaction chamber equipment ideal for a wide variety of deposition processes, including ultra-thin film deposition and etching. This system is designed for use in the production of ultra-thin films on semiconductor substrates for applications such as semiconductor fabrication, MEMS/MOEMS, LED, OLED, for solar cell fabrication, and more. The AxZ Chamber unit is comprised of two components: the main body and the Endura CL module. The main body of the AxZ Chamber is constructed from stainless steel and is designed to provide maximum structural integrity and reliable operation. It features an innovative design that minimizes the local deposition non-uniformities in order to deliver uniform deposition across the entire surface of the wafer. The Endura CL module is made up of an E-Chamber, a central pre-heating unit, and an exhaust stack. The E-Chamber is composed of a lidded chamber, process gas inlets, and wafer lift pins. The pre-heating unit consists of a quartz tube heater, infrared lamps, and a thermocouple, all of which are thermally isolated from the E-Chamber to prevent contamination of the process. The exhaust stack is designed to quickly evacuate any dangerous or hazardous substances produced during etching or deposition processes. The AxZ Chamber for Endura CL is ideal for a wide range of deposition processes such as chemical vapor deposition (CVD), physical vapor deposition (PVD), electrochemical deposition (ECD), and plasma enhanced chemical vapor deposition (PECVD). This machine can accommodate wafers up to 8-inches in diameter and can process substrates, such as silicone, titanium, and aluminum. It also features a high containment level (HCL) capability for increased safety during operation. Additionally, the AxZ Chamber for Endura CL can operate in both manual and automatic modes, making it an ideal choice for production line manufacturing. In summary, AMAT AxZ Chambers for Endura CL is an extremely versatile reaction chamber tool designed for reliable performance and accurate wafer processing. It features a robust stainless steel main body and a modular Endura CL module for increased functionality, and can accommodate a wide variety of wafer types. Furthermore, it is compatible with various deposition processes and is capable of working in both manual and automatic modes. The AxZ Chamber for Endura CL is ideal for semiconductor fabrication, MEMS/MOEMS, and other related applications.
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