Used AMAT / APPLIED MATERIALS Centura 5200 ACP / EPI #160377 for sale

AMAT / APPLIED MATERIALS Centura 5200 ACP / EPI is a tool used in semiconductor fabrication processes that is designed to produce high-quality integrated circuits and wafer-level packaging. It is an advanced deposition and etch reactor that delivers the uniformity, repeatability and process precision required at the modern advanced nodes. AMAT Centura 5200 ACP / EPI offers an optimal platform for advanced materials deposition and etch processes. It is a single-wafer load lock system with a separate etching chamber used for dry etch processes. This allows for deposition and etching to be done inline instead of sequentially with a separate tool for each process step. The tool is also excellent for wafer-level passivation processes. APPLIED MATERIALS Centura 5200 ACP / EPI incorporates a modular substrate turn bar which supports wafer orientation for uniform etching. This design feature provides improved repeatability and process uniformity when compared to conventional tools. Centura 5200 ACP / EPI also features a powerful Robot Handler with a uni-directional transfer method. This feature ensures accurate alignment and secure handling of substrates when transferring them between the process modules. AMAT / APPLIED MATERIALS Centura 5200 ACP / EPI offers an enhanced process chamber design with improved plasma uniformity, repeatability and throughput. The plasma is generated with both electron cyclotron resonance (ECR) and inductively coupled plasma (ICP) sources. It also has a radio frequency (RF) power generator which enables the user to adjust power levels quickly and accurately. The user can also set pressure levels and a crystal quartz window temperature probe enables inspection and monitoring of process temperatures. AMAT Centura 5200 ACP / EPI offers technology and performance that enable the production of state-of-the-art integrated circuits and complex wafer-level packages. Its excellent deposition and etch uniformity meets the challenging process requirements at the latest advanced nodes. The advanced design of the tool ensures optimal substrate transport and handling, as well as the best possible repeatability and process precision. With features like its RF power generator, pressure control, temperature probe, and modular turn bar, APPLIED MATERIALS Centura 5200 ACP / EPI is an effective tool for achieving the highest possible performance for advanced semiconductor fabrication processes.