Used AMAT / APPLIED MATERIALS Centura 5200 DPS #9122814 for sale
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ID: 9122814
Wafer Size: 8"
Vintage: 1997
Poly silicon etch system, 8"
(2) Chambers
Position A: DPS Poly R1
Position B: DPS Poly R1
Position F: Orientor
Narrow body load locks
HP Robot
Generator rack
NBLL's
System controller
1997 vintage.
AMAT (APPLIED MATERIALS) AMAT / APPLIED MATERIALS Centura 5200 DPS is a large-scale manufacturing reactor designed for creating and sculpting semiconductor devices such as transistors, chips, and other electronic components. The reactor is composed of three components: the quartz chamber, the gas delivery equipment, and the process control system. The quartz chamber is a cylindrical-shaped chamber made of quartz, a naturally occurring silica-based material. The chamber is designed with an array of ports to hold wafers and gases during the fabrication process. Through the arrangement of ports, gases, and wafers, manufacturers can create a variety of products in the Chamber. To prevent contamination, the quartz chamber is vacuum sealed and heated to reduce the presence of unwanted particles. The gas delivery unit is the second component of AMAT Centura 5200 DPS. This machine enables manufacturers to create different reactions inside the chamber by delivering precise amounts of gases. The gas delivery tool utilizes a set of gas flow controllers, valves, and piping which are monitored by the asset's process control software. By accurately measuring how much of each gas is pumped into the reactor, users can alter the type of reaction that takes place. The final component of APPLIED MATERIALS Centura 5200 DPS is the process control model. This controls the entire fabrication process from start to finish. It controls the gas flow, the chamber temperature, the power input, and the chamber pressure. It also monitors important parameters such as the resistance, breakdown voltage, and mobility. The process control equipment is also responsible for alerting the manufactuers when predetermined limits are reached. Centura 5200 DPS reactor is an extremely powerful fabrication tool that is capable of manipulating and sculpting a variety of semiconductor devices. With the advanced features of its quartz chamber, gas delivery system, and process control unit, the reactor is able to accurately produce complex electronic components.
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