Used AMAT / APPLIED MATERIALS Centura 5200 DxZ #9198724 for sale
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ID: 9198724
Wafer Size: 8"
CVD System, 8"
Loadlock Indexer
Process chamber lift
HP Robot
System information:
(3) Chambers:
Chamber A: DXZ SiN
Chamber B: DXZ SiN
Chamber C: DXZ SiN
Chamber E: MS Cool
LLA: Narrow
LLB: Narrow
Mainframe:
System placement: Through the wall
Robot type: HP Robot
Robot blade: Nickel coated AL
OTF
W/F Position sensor
Loadlock:
Loadlock cassette: Narrow
Wafer mapping: Basic
N2 Purge type: Tylan 2900
Chamber A, B and C:
Clean method: RF
Frequency: Single HF
Throttle valve type: Dual spring
Manometer: Dual 10/100 torr
Electrical:
Line frequency: 50/60 Hz
Line voltage: 200/208 V
Line amperage: 240A
System monitors:
1st Monitor: Through the wall
2nd Monitor: Stand alone
Generator (AC) rack:
(3) Generators: AE RFG 2000-2V
Umbilicals:
Monitor: 55ft
Signal cable length (S/C ~ MF): 50ft
HX Cable length: 55ft
Gas delivery options:
MFC Type: STEC 4400 MC
Valves: Veriflo 10 Ra Max
Filters: Millipore
Transducers: MKS with out display
Regulators: Veriflo
System cabinet exhaust: Top
Gas pallet configuration:
Chamber A, B & C: SEC4400
System controller:
Slot Top rack BD
2 System reset
3 Lk Det 1&2 orConv/TC
5 Lk Det 5&6 orConv/TC
6 Lk Det 7&8 orConv/TC
9 EWOB Centerfinder
12 Floppy disk drive
13 Hard disk drive
14 Chamber A interface
15 Chamber B interface
16 Chamber C interface
18 Chamber E interface
19 Mainframe interface
20 Loadlock interface
21 Chamber A Dl/O 1
22 Chamber A Dl/O 2
23 Chamber B Dl/O 1
24 Chamber B Dl/O 2
25 Chamber C Dl/O 1
26 Chamber C Dl/O 2
29 Chamber E DI/O
30 Synergy SBC(V440)
32 Video
33 I/O Expansion
34 SEI
35 Chamber A Al/O
36 Chamber B Al/O
37 Chamber C Al/O
39 Mainframe Al/O 1
40 Chamber E/MF Al/O 2
41 Mainframe Dl/O 1
42 Mainframe Dl/O 2
43 Mainframe Dl/O 3
44 Mainframe Dl/O 4
45 Mainframe Dl/O 5
46 Mainframe Dl/O 6
47 Stepper 1
48 Stepper 2
49 Stepper 3
50 OMS (VMEX)
RF Generator:
Chamber Maker Model
A, B & C AE RFG 2000-2V 3155053-003B
RF Match box (Match multifunction adapter with interlock 7-J14 OHM):
Chamber Maker Model
A AE 3155077-003B
B & C AE 3155077-003A
Heat exchanger:
APPLIED MATERIALS AMAT0 Heat exchanger, 0010-70008.
AMAT / APPLIED MATERIALS Centura 5200 DxZ is a semiconductor reactor equipped with a new level of precision and performance for microelectronic fabrication. It takes advantage of AMAT advanced manufacturing technology to produce features that are small, precise and consistent. The reactor is designed with an advanced ion source, which has the ability to quickly add and remove ions from the etch chamber to improve process performance. The high-end ion source provides superior control and precision for accurate etching. AMAT Centura 5200 DxZ is also equipped with a next-generation chamber design. The chamber has four walls all designed to work hand-in-hand to produce high-quality, accurate etching with minimized material loss. The walls serve as highly precise walls to delimit etch recipes, in addition to providing superior temperature and pressure control during operation. The walls also promote quieter operation while still guaranteeing perfect accuracy. APPLIED MATERIALS Centura 5200 DxZ uses a proprietary substrate holder to securely hold the substrate in place to ensure precise etching. The reactor also includes a computer-controlled, automatic gas mixing system that ensures the proper amount of gases are delivered to the etch chamber for accurate etching. The gases used are nitrogen, argon, and oxygen. An interfaced RF generator provides the required power for the correct etching process. Centura 5200 DxZ is designed for both semiconductor and MEMS fabrication environments. It is capable of processing large and small wafers with feature sizes as small as 25 nanometers. This powerhouse of a reactor is perfect for designing, thinning, etching, and passivating features with unmatched precision. Additionally, it is designed to work with multiple etch environments and etch recipes that include dry etch, wet etch, plasma etch, reactive ion etch, deep reactive ion etch, and ionized physical etch. This makes AMAT / APPLIED MATERIALS Centura 5200 DxZ the perfect choice for producing powerful, precise, and consistent products.
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