Used AMAT / APPLIED MATERIALS Centura 5200 DxZ #9255226 for sale
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ID: 9255226
System
(2) Chambers, 8"
Platform type: Centura 5200-I, 8"
Loadlock: Narrow body
Robot: HP+
Position A: Chamber A DxZ PE-TEOS
Position B: Chamber B DxZ PE-TEOS
Position E: Multi slot cool down
Chamber clean: RF Clean
Gas panel: GPLIS
RF Generator: ADVANCED ENERGY RFG 2000-2V
Line frequency: 50/60 Hz.
AMAT / APPLIED MATERIALS Centura 5200 DxZ is a high-quality, high-performance reactor for a range of applications in the chemical industry. Its unique design and adjustable parameters allow for greater precision and control than other similar systems. AMAT Centura 5200 DxZ has a 50 cm process chamber that allows for a wide range of chemical processes including etch, deposition, cycling and cleaning. The chamber is sealed with a Nichrome seal and is capable of operating at temperatures of up to 850°C. The chamber's unique design, which incorporates a robust vessel, a rotating bubbler, and a stationary purging line, allows for greater accuracy and control during the reaction process. The system includes a computer-controlled interface that is used to monitor and control the parameters of the reactor such as pressure, temperature, and reactant flow. It also provides feedback regarding the completed reaction, allowing for greater accuracy and control than other similar systems. APPLIED MATERIALS Centura 5200 DxZ is constructed with a stainless steel body and a helium-sealed exhaust system for reliable performance and durability. It also has a high-efficiency positive-pressure valve for the safe and secure operation of the system, as well as a useful stationary purging line that helps reduce the time required to initiate and complete the reaction. This reactor is suitable for use in a number of industries, such as self-cleaning, plasma-etching (SiO2 or oxide removal), and other processes. Its computer-controlled interface, adjustable parameters, and durable construction makes it a reliable and cost-effective choice for many chemical applications.
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