Used AMAT / APPLIED MATERIALS Centura 5200 Epi #9395804 for sale
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AMAT / APPLIED MATERIALS Centura 5200 Epi is a cost-efficient, highly reliable, and customizable semiconductor reactor. It enables the deposition, etch and oxidation of semiconductor device layers using its advanced process control, heating and cooling systems, and precision substrate cleaning. This single-wafer deposition/etch system is popularly used in several compound semiconductor fabrication processes such as HBT, RTD, and MPW device layer growth. This Epi reactor is comprised of a standard load unit, capable of supporting 300 mm of wafer sizes and containing a wide range of materials such as Aluminum, Silicon, and Gallium-Arsenide. It also includes a user-friendly human-machine interface that permits easy manipulation and monitoring of process parameters. Additionally, AMAT provide maximum up-time support with extended warranty and service periods. Its integrated plasma source also enables faster ion implantation and etching processes. The Centura 5200 series prides itself in ultra-high accuracy and uniformity, with the ability to handle up to a 200mm wafer size. With its plug-and-play production configuration and high deposition throughput, it is highly capable of producing superior quality device layer thickness, uniformity, and improved yields. Its higher rate of throughput also supports high-volume production. To ensure quality control, APPLIED MATERIALS Centura 5300 also includes several in-situ sensors to measure and monitor temperature, pressure, and other subsurface conditions. Its innovative Ultima Epi design further improves the quality with an advanced substrate control mechanism and improved thermal uniformity. The multiple heating and cooling zones, with an option of increasing the number of zones with a maximum of six, helps keep the wafer temperatures consistent during long processing times. Equipped with a comprehensive monitoring system, AMAT / APPLIED MATERIALS Centura 5300 also provides multiple indicators to ensure better process repeatability. Allowing users to program their own recipe parameters, it helps achieve greater yields and quality. This makes it possible for customers to customize their production, allowing for greater flexibility and optimized results. The mission of AMAT Centura 5200 Epi system is to provide industry-leading equipments with superior capabilities and operation efficiency. With superior reliability and cost-effectiveness, it continues to be one of the most popular platforms for compound semiconductor production applications.
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