Used AMAT / APPLIED MATERIALS Centura 5200 HTF #9146382 for sale

AMAT / APPLIED MATERIALS Centura 5200 HTF (High Temperature Furnace) is a versatile, thermal processing tool developed for high-frequency applications up to a temperature of 850°C, suitable for extensive post metallization annealing, dopant activation, and polysilicon recrystallization. The 5200 HTF provides a number of features in its design in order to promote consistent, long-term thermal processing. Its unique elliptical-shaped design comprises both horizontal and vertical temperature field distribution, which minimizes temperature uniformity issues. It is designed with dual-source, dual-frequency induction heating, providing high efficiency at low, consistent power levels. In addition, its high output, two-stage water cooling equipment effectively maintains process temperatures, and is engineered to minimize any process-generated particulate contamination. A comprehensive programmable logic controller (PLC) system supports reliable, repeatable process control. It is equipped with a full suite of safety features including an over-temperature interlock circuit, water flow monitoring, and thermal imaging. Additionally, the PLC unit is designed to store a large number of processing recipes, making it capable of conducting multiple processes in rapid succession. The machine's clean room compatible design features a sealed chamber with no purge gas requirements, and a dual recovery tool with CFC-free refrigerants for improved filter cleaning. It is also integrated with AMAT Ultrapure™ cleaning asset for a contamination-free environment. The 5200 HTF is the ideal thermal processing tool for research and development, as well as for high-volume, industrial-scale production of high quality electronic devices. Its advanced features allow for superb temperature uniformity and control, enabling reliable repeatable thermal processes and superior product quality.