Used AMAT / APPLIED MATERIALS Centura 5200 Phase I #9186211 for sale

AMAT / APPLIED MATERIALS Centura 5200 Phase I is a high-performance plasma-enhanced chemical vapor deposition (PECVD) reactor designed to be utilized for deposition of high-purity, low-stress deposition films. This reactor has a wide range of processing technologies such as inductively coupled plasma (ICP) etching, ion implantation, and plasma enhanced atomic layer deposition (PEALD). The wafer bed can process up to three hundred mm (300 mm) and six inch (6") wafers with minimal contamination. It utilizes a gas box to create a stable and reproducible chemistry for any wafer size, which ensures the uniform thickness and smoothness of each deposit. The wafer bed is temperature-controlled to ensure the same substrate temperature in every process cycle. AMAT Centura 5200 Phase I is equipped with an optimized microwave power equipment that has more efficiency and power than prior models. This system ensures that it can provide more consistent power for processing steps such as etching and deposition. It also is optimized to reduce particle counts during film deposition. The unit is designed with a range of process capabilities, enabling the user to process a wide variety of materials. It is optimized for thin film deposition, sulfide etching and anodic bonding processes, and can be used to deposit films such as nitrides, polysilicon, oxides, and copper. Furthermore, this reactor is capable of depositing amorphous and polycrystalline materials, enabling rapid prototyping or roll-out of products. The machine also comes with a temperature controller that can be set to target the desired wafer temperature. The reactor is also designed with an automatic pressure and flow control tool to maintain a consistent and optimized process chamber pressure. It also comes equipped with a hydrocarbon monitor and a multi-channel RF flow meter to optimize process repeatability. APPLIED MATERIALS Centura 5200 Phase I is designed to exceed industry standards in safety and reliability. It meets SEMI safety standards and is CE certified. It also has a deep-UV lamp, which has a longer shelf life than traditional mercury lamps and ensures a clean and sterile deposition environment. This reactor is a great choice for customers who are looking for a reliable, robust, and safe PECVD asset.