Used AMAT / APPLIED MATERIALS Centura 5200 Ultima #9355275 for sale
URL successfully copied!
Tap to zoom
ID: 9355275
Wafer Size: 8"
Vintage: 2000
HDP CVD System, 8"
NBLL Loadlock
HP Buffer robot
Chambers type:
Chamber A: Ultima STD
Chamber B: Ultima TE
Chamber C: Ultima STD
Chamber E: MSC
Chamber F: Orient
Missing parts:
Remote AC Rack
RF Rack
Cable
2000 vintage.
AMAT / APPLIED MATERIALS Centura 5200 Ultima Reactor is an advanced crystal growth equipment designed for the demanding requirements of research and industrial applications in material science. The system promises high-end performance with high yields from epitaxial growth processes, while providing temperature uniformity, exceptional cycle repeatability and extremely low oxygen levels. The Centura is powered by a pair of high-performance diffusion pumps, fed by a regulated nitrogen gas supply, and it is capable of handling a wide range of precursor materials. It is made of two independent process chambers, linked by a common transfer chamber. One chamber is dedicated to growth, while the other is allocated to cleaning, loading and unloading of samples. The transfer chamber serves as a buffer between the two, allowing a safe and efficient gas-tight transfer of wafers between chambers. Each chamber of AMAT Centura 5200 Ultima is equipped with its own unit of gas and temperature control. Each has its own temperature controller with a range from 200C to 1000C, and an independent set of 16 high-precision mass flow controllers for precise flow rate control and independent gas flow regulation. By using the precision controllers, the flow rate can be regulated during the entire process cycle; the Centura is capable of maintaining a tight temperature uniformity window. The high-end performance of the Centura is due to its advanced design. For safety and reliability, the reactor is provided with a redundant shut-down machine that will pause the process if an unexpected event occurs. The tool is mainly vacuum sealed, which reduces the risk of contamination. Furthermore, the asset has an auto-set-up feature, which allows for pre-stored process protocols; this is useful for automation and labour savings. The Centura's top performance and reliability make it the ideal choice for advanced research and industrial applications in material science. The model's performance is underpinned by cutting-edge design and advanced engineering, and this makes it an attractive choice for customers with demanding requirements.
There are no reviews yet